发明授权
US08652929B2 CMOS device for reducing charge sharing effect and fabrication method thereof
有权
用于降低电荷共享效应的CMOS器件及其制造方法
- 专利标题: CMOS device for reducing charge sharing effect and fabrication method thereof
- 专利标题(中): 用于降低电荷共享效应的CMOS器件及其制造方法
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申请号: US13582034申请日: 2012-04-16
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公开(公告)号: US08652929B2公开(公告)日: 2014-02-18
- 发明人: Ru Huang , Fei Tan , Xia An , Qianqian Huang , Dong Yang , Xing Zhang
- 申请人: Ru Huang , Fei Tan , Xia An , Qianqian Huang , Dong Yang , Xing Zhang
- 申请人地址: CN Beijing
- 专利权人: Peking University
- 当前专利权人: Peking University
- 当前专利权人地址: CN Beijing
- 代理机构: Bozicevic, Field & Francis LLP
- 代理商 Bret E. Field
- 优先权: CN201110436842 20111223
- 国际申请: PCT/CN2012/074076 WO 20120416
- 国际公布: WO2013/091331 WO 20130627
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/02 ; H01L21/3063 ; H01L21/84
摘要:
The present invention discloses a CMOS device of reducing charge sharing effect and a fabrication method thereof. The present invention has an additional isolation for trapping carriers disposed right below an isolation region. the material of the additional isolation region is porous silicon. Since porous silicon is a functional material of spongy structure by electrochemistry anodic oxidizing monocrystalline silicon wafer, there are a large number of microvoids and dangling bonds on the surface layer of the porous silicon. These defects may form defect states in a center of forbidden band of the porous silicon, the defect states may trap carriers so as to cause an increased resistance. And with an increase of density of corrosion current, porosity increases, and defects in the porous silicon increase. The present invention can reduce the charge sharing effect due to heavy ions by using a feature that the defect states in the porous silicon trap carriers, the formation of a shallow trench isolation (STI) region and a isolation region underneath only needs one time photolithography, and the process is simple, so that radioresistance performance of an integrated circuit may be greatly increased.
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