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US08653648B2 Zigzag pattern for TSV copper adhesion 有权
Zigzag图案为TSV铜附着力

Zigzag pattern for TSV copper adhesion
摘要:
A system and method for forming a TSV contact is presented. A preferred embodiment includes a TSV in contact with a portion of the uppermost metal layer of a semiconductor die. The interface between the TSV conductor and the contact pad is preferably characterized by a non-planar zigzag pattern that forms a grid pattern of contacts. Alternatively, the contacts may form a plurality of metal lines that make contact with the contact pad.
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