发明授权
- 专利标题： Method of manufacturing optical waveguide having mirror face, and optoelectronic composite wiring board
- 专利标题（中）： 制造具有镜面的光波导的方法和光电复合布线板
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申请号： US13258551申请日： 2010-03-26
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公开(公告)号： US08655126B2公开(公告)日： 2014-02-18
- 发明人: Naoyuki Kondou , Tohru Nakashiba , Junko Yashiro , Shinji Hashimoto
- 申请人： Naoyuki Kondou , Tohru Nakashiba , Junko Yashiro , Shinji Hashimoto
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JP2009-077791 20090326
- 国际申请： PCT/JP2010/056040 WO 20100326
- 国际公布： WO2010/110496 WO 20100930
- 主分类号： G02B6/26
- IPC分类号： G02B6/26 ; G02B6/42 ; H01L21/00
摘要：
In order to provide a method of manufacturing an optical waveguide, which enables the formation of a smooth mirror face, the following method of manufacturing an optical waveguide having a mirror face is used. The method includes: a photocurable resin sheet laminating step of laminating an uncured photocurable resin sheet for forming a core on a surface of a first cladding layer that has been formed on a substrate; a mirror face forming step of forming a mirror face for guiding light to the core by pressing a die provided with a blade having, in a cross-section, a 45° inclined plane into the photocurable resin sheet; a core forming step of forming a core having the mirror face positioned at an end thereof by selectively exposing to light, and developing, the photocurable resin sheet; and a cladding layer forming step of forming a second cladding layer so as to bury the core.