发明授权
- 专利标题： Method and apparatus for manufacturing fused silica crucible, and the fused silica crucible
- 专利标题（中）： 熔石英坩埚的制造方法和设备以及石英玻璃坩埚
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申请号： US12564197申请日： 2009-09-22
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公开(公告)号： US08657957B2公开(公告)日： 2014-02-25
- 发明人: Hiroshi Kishi , Masanori Fukui , Masaki Morikawa
- 申请人： Hiroshi Kishi , Masanori Fukui , Masaki Morikawa
- 申请人地址： JP Akita-Shi
- 专利权人： Japan Super Quartz Corporation
- 当前专利权人： Japan Super Quartz Corporation
- 当前专利权人地址： JP Akita-Shi
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JPP2008-244521 20080924
- 主分类号： C30B35/00
- IPC分类号： C30B35/00 ; C30B11/00 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04
摘要：
A method of manufacturing a fused silica crucible by heating and melting a vitreous silica powder compact shaped into a mold using arc discharge of electrodes arranged around a rotation shaft of the mold, includes the steps of: arranging the electrodes in a ring shape, and setting a ratio W/R of a horizontal distance W between the electrode front end and the surface of the vitreous silica powder compact to a vitreous silica powder compact opening radius R, for at least a predetermined time during arc heating, to be in the range of 0.002 to 0.98.
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