- 专利标题: Structure for multi-row leadframe and semiconductor package thereof and manufacture method thereof
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申请号: US13142172申请日: 2009-12-23
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公开(公告)号: US08658471B2公开(公告)日: 2014-02-25
- 发明人: Hyun A. Chun , Jae Bong Choi , Sung Won Lee , Sung Wuk Ryu , Hyuk Soo Lee , Sai Ran Eom
- 申请人: Hyun A. Chun , Jae Bong Choi , Sung Won Lee , Sung Wuk Ryu , Hyuk Soo Lee , Sai Ran Eom
- 申请人地址: KR
- 专利权人: LG Innotek Co., Ltd.
- 当前专利权人: LG Innotek Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Saliwanchik, Lloyd & Eisenschenk
- 优先权: KR10-2008-0132887 20081224
- 国际申请: PCT/KR2009/007724 WO 20091223
- 国际公布: WO2010/074510 WO 20100701
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/495
摘要:
The present invention relates to a multi-row leadframe for semiconductor packaging, characterized by: forming a plating pattern on a leadframe material (first step); forming a protective pattern on the plating pattern (second step); and forming a nano pattern by using the protective pattern as a mask (third step), whereby a protective pattern is formed on an upper surface of a plating pattern to increase reliability of a product by preventing damage to a plating layer caused by etching solution during pattern formation of leadframe and to thereby solve the problem of using the plating layer as an etching mask.
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