Invention Grant
- Patent Title: Ultrathin buried die module and method of manufacturing thereof
- Patent Title (中): 超薄埋模组件及其制造方法
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Application No.: US13431168Application Date: 2012-03-27
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Publication No.: US08658473B2Publication Date: 2014-02-25
- Inventor: Paul Alan McConnelee , Scott Smith , Elizabeth Ann Burke
- Applicant: Paul Alan McConnelee , Scott Smith , Elizabeth Ann Burke
- Applicant Address: US NY Schenectady
- Assignee: General Electric Company
- Current Assignee: General Electric Company
- Current Assignee Address: US NY Schenectady
- Agency: Ziolkowski Patent Solutions Group, SC
- Agent Jean K. Testa
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/12

Abstract:
A method of forming a buried die module includes providing an initial laminate flex layer and forming a die opening through the initial laminate flex layer. A first uncut laminate flex layer is secured to the first surface of the initial laminate flex layer via an adhesive and a die is positioned within the die opening of the initial laminate flex layer. A second uncut laminate flex layer is secured to the second surface of the initial laminate flex layer via an adhesive and the adhesive between each pair of neighboring layers is cured. A plurality of vias and metal interconnects are formed in and on the first and second uncut laminate flex layers, with each of the metal interconnects extending through a respective via and being directly metalized to a metal interconnect on the initial laminate flex layer or a die pad on the die.
Public/Granted literature
- US20130256900A1 ULTRATHIN BURIED DIE MODULE AND METHOD OF MANUFACTURING THEREOF Public/Granted day:2013-10-03
Information query
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