发明授权
- 专利标题： Passivated micromechanical resonators and related methods
- 专利标题（中）： 钝化微机械谐振器及相关方法
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申请号： US12885080申请日： 2010-09-17
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公开(公告)号： US08664836B1公开(公告)日： 2014-03-04
- 发明人: Jan H. Kuypers , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani
- 申请人： Jan H. Kuypers , David M. Chen , Alexei Gaidarzhy , Guiti Zolfagharkhani
- 申请人地址： US MA Cambridge
- 专利权人： Sand 9, Inc.
- 当前专利权人： Sand 9, Inc.
- 当前专利权人地址： US MA Cambridge
- 代理机构： Wolf, Greenfield & Sacks, P.C.
- 主分类号： H01L41/16
- IPC分类号： H01L41/16
摘要：
Passivated micromechanical resonators and related methods are described. Applicants have appreciated that polycrystalline conductive layers used as electrodes for some MEMS resonators are a source of mechanical and electrical instability. To inhibit or prevent contamination of such conductive layers, which may exacerbate the instabilities, passivation structures are used. The passivation structures can be grown, deposited, or otherwise formed.
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