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1.发明授权公开(公告)号：US08937425B2
公开(公告)日：2015-01-20
申请号：US13313511
申请日：2011-12-07
IPC分类号： H03H9/02
CPC分类号： H03H9/02834 , H03H9/02102 , H03H9/02228 , H03H9/02448 , H03H9/02574
摘要： Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations. The compensating structure may have multiple layers, one of which may have a stiffness that increases with increasing temperature and one of which may have a stiffness that decreases with increases in temperature.
摘要翻译： 描述了机械谐振结构，以及相关的装置和方法。 机械谐振结构可以具有用于补偿温度变化的补偿结构。 补偿结构可以具有多个层，其中之一可以具有随着温度升高而增加的刚度，并且其中的一个可以具有随温度升高而降低的刚度。
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公开(公告)号：US20130200752A1
公开(公告)日：2013-08-08
申请号：US13367745
申请日：2012-02-07
IPC分类号： H01L41/04
CPC分类号： H03H9/02259 , H03H9/02 , H03H9/2463 , H03H2009/02251 , H03H2009/241
摘要： Mechanical resonating structures and related methods are described. The mechanical resonating structures may provide improved efficiency over conventional resonating structures. Some of the structures have lengths and widths and are designed to vibrate in a direction approximately parallel to either the length or width. They may have boundaries bounding the length and width dimensions, which may substantially align with nodes or anti-nodes of vibration.
摘要翻译： 描述机械谐振结构及相关方法。 与常规谐振结构相比，机械谐振结构可提供改进的效率。 一些结构具有长度和宽度，并且被设计成在大致平行于长度或宽度的方向上振动。 它们可以具有限定长度和宽度尺寸的边界，其可以基本上与振动的节点或反节点对齐。
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公开(公告)号：US20120056510A9
公开(公告)日：2012-03-08
申请号：US12899447
申请日：2010-10-06
IPC分类号： H01L41/107 , H01L41/22 , H01L41/053 , H01L41/18 , H01L41/047
CPC分类号： H03H3/007 , H03H9/02007 , H03H9/02244 , H03H9/02535
摘要： Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator, may then be formed from the piezoelectric material wafer.
摘要翻译： 描述了具有与基板一体化的压电材料结构的装置。 还描述了用于形成这种装置的制造技术。 该制造可以包括将压电材料晶片结合到不同材料的衬底。 然后可以由压电材料晶片形成诸如谐振器的结构。
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4.发明授权公开(公告)号：US08058769B2
公开(公告)日：2011-11-15
申请号：US12639161
申请日：2009-12-16
IPC分类号： H01L41/04
CPC分类号： H03H9/02834 , H03H9/02102 , H03H9/02228 , H03H9/02448 , H03H9/02574
摘要： Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.
摘要翻译： 描述了机械谐振结构，以及相关的装置和方法。 机械谐振结构可以具有用于补偿温度变化的补偿结构。
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公开(公告)号：US08044736B2
公开(公告)日：2011-10-25
申请号：US12111535
申请日：2008-04-29
申请人： Pritiraj Mohanty , Klaus Juergen Schoepf , Alexei Gaidarzhy , Guiti Zolfagharkhani , David M. Chen , Matthew J. Crowley
发明人： Pritiraj Mohanty , Klaus Juergen Schoepf , Alexei Gaidarzhy , Guiti Zolfagharkhani , David M. Chen , Matthew J. Crowley
IPC分类号： H03B5/30
摘要： Timing oscillators as well as related methods and devices are described. A timing oscillator may include a mechanical resonating structure with major elements and minor elements coupled to the major element. The timing oscillator can generate stable signals with low phase noise at very high frequencies which allows a timing oscillator to be used effectively in a number of devices including computers and mobile phones for time and data synchronization purposes. The signal generated by the timing oscillator can be tuned using a driver circuit and a compensation circuit.
摘要翻译： 描述了定时振荡器以及相关方法和设备。 定时振荡器可以包括具有耦合到主要元件的主要元件和次要元件的机械谐振结构。 定时振荡器可以以非常高的频率产生具有低相位噪声的稳定信号，这允许定时振荡器在包括计算机和移动电话在内的多个设备中被有效地用于时间和数据同步目的。 由定时振荡器产生的信号可以使用驱动电路和补偿电路进行调谐。
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公开(公告)号：US20100314969A1
公开(公告)日：2010-12-16
申请号：US12732575
申请日：2010-03-26
申请人： Alexei Gaidarzhy , Jan H. Kuypers , David M. Chen , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf , Behraad Bahreyni
发明人： Alexei Gaidarzhy , Jan H. Kuypers , David M. Chen , Guiti Zolfagharkhani , Pritiraj Mohanty , Klaus Juergen Schoepf , Behraad Bahreyni
IPC分类号： H01L41/04
CPC分类号： H03H9/02338 , H03H9/02433 , H03H2009/0244
摘要： Apparatus and methods of connecting mechanical resonating structures to a body are described. Multi-element anchors may include a flexible portion that flexes when the mechanical resonating structure vibrates. The flexible portion may have a length related to the resonance frequency of the mechanical resonating structures. Some of the multi-element anchors include elements that are oriented perpendicularly to each other. MEMS incorporating such structures are also described.
摘要翻译： 描述了将机械谐振结构连接到主体的装置和方法。 多元件锚可以包括当机械共振结构振动时弯曲的柔性部分。 柔性部分可以具有与机械谐振结构的谐振频率相关的长度。 一些多元件锚定件包括彼此垂直取向的元件。 还描述了结合这种结构的MEMS。
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公开(公告)号：US09075077B2
公开(公告)日：2015-07-07
申请号：US13234352
申请日：2011-09-16
IPC分类号： G01P15/10 , G01C19/56 , G01P15/097 , G01C19/5733
CPC分类号： G01P15/097 , G01C19/5733
摘要： A device or system that incorporates teachings of the present disclosure may include, for example, a resonant structure having a plate, a mass and a set of electrodes. The plate can have an extensional mode at a frequency when excited. The set of electrodes can be used to measure an acceleration of the mass when the acceleration of the mass changes the frequency of the plate. Other embodiments are disclosed.
摘要翻译： 结合本公开的教导的装置或系统可以包括例如具有板，质量和一组电极的谐振结构。 该板可以在激发时具有频率的拉伸模式。 当质量的加速度改变板的频率时，该组电极可用于测量质量的加速度。 公开了其他实施例。
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公开(公告)号：US08638179B2
公开(公告)日：2014-01-28
申请号：US13330965
申请日：2011-12-20
申请人： Alexei Gaidarzhy , Pritiraj Mohanty
发明人： Alexei Gaidarzhy , Pritiraj Mohanty
CPC分类号： H03H9/02259 , B81B3/0086 , B81B2201/0271 , H03H9/02275 , H03H9/02338 , H03H9/02417 , H03H9/2405 , H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02464 , H03H2009/02496
摘要： Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure. A bias structure separated from the mechanical resonating structure is provided to tune a resonance frequency of the mechanical resonating structure.
摘要翻译： 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。 提供与机械谐振结构分离的偏置结构来调谐机械谐振结构的谐振频率。
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公开(公告)号：US08314665B2
公开(公告)日：2012-11-20
申请号：US12311141
申请日：2007-09-20
摘要： A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.
摘要翻译： 一种纳米机电集成电路滤波器及其制作方法。 滤波器包括硅衬底; 牺牲层; 包括至少一个谐振器的器件层，其中所述谐振器包括亚微米可激发元件，并且其中所述至少一个谐振器具有基本模式频率以及集体模式频率，并且其中所述至少一个谐振器的所述集体模式频率为 由亚微米元素的基频决定。
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公开(公告)号：US08111108B2
公开(公告)日：2012-02-07
申请号：US12181531
申请日：2008-07-29
申请人： Alexei Gaidarzhy , Pritiraj Mohanty
发明人： Alexei Gaidarzhy , Pritiraj Mohanty
IPC分类号： H03B5/30
CPC分类号： H03H9/02259 , B81B3/0086 , B81B2201/0271 , H03H9/02275 , H03H9/02338 , H03H9/02417 , H03H9/2405 , H03H9/2431 , H03H9/2463 , H03H2009/02354 , H03H2009/02464 , H03H2009/02496
摘要： Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.
摘要翻译： 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。
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