Invention Grant
- Patent Title: Apparatus and method for molecule detection using nanopores
- Patent Title (中): 使用纳米孔分子检测的装置和方法
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Application No.: US13059410Application Date: 2009-08-12
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Publication No.: US08669124B2Publication Date: 2014-03-11
- Inventor: Matthias Merz
- Applicant: Matthias Merz
- Applicant Address: NL Eindhoven
- Assignee: NXP, B.V.
- Current Assignee: NXP, B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP08105086 20080820
- International Application: PCT/IB2009/053560 WO 20090812
- International Announcement: WO2010/020912 WO 20100225
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L29/66
Abstract:
A detector device and method of its fabrication are disclosed. Illustratively, an additional via is present through an insulator layer over a gate channel region which is on top of the channel region. The additional via is filled with conductor material. The conductor material is removed to form a chamber leading to one side of the gate channel region. Furthermore, a nanopore is etched from the chamber through the channel region.
Public/Granted literature
- US20110133255A1 APPARATUS AND METHOD FOR MOLECULE DETECTION USING NANOPORES Public/Granted day:2011-06-09
Information query
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