发明授权
- 专利标题: Method for manufacturing an organic light emitting diode display
- 专利标题(中): 用于制造有机发光二极管显示器的方法
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申请号: US13860339申请日: 2013-04-10
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公开(公告)号: US08669127B2公开(公告)日: 2014-03-11
- 发明人: Yul-Kyu Lee , Sun Park , Chun-Gi You , Jong-Hyun Park
- 申请人: Yul-Kyu Lee , Sun Park , Chun-Gi You , Jong-Hyun Park
- 申请人地址: KR Yongin, Gyeonggi-Do
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin, Gyeonggi-Do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2010-0093837 20100928
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Making an OLED display, includes forming a first storage plate and a gate insulating layer covering the first storage plate on a substrate; sequentially forming a second storage plate covering the first storage plate and a capacitor intermediate on the gate insulating layer; forming a first doping region by injecting an impurity to a part that is not covered by the capacitor intermediate in the first storage plate; forming an interlayer insulating layer having a capacitor opening exposing the capacitor intermediate, and a plurality of erosion preventing layers on an edge of the capacitor intermediate toward the first doping region in the capacitor opening; removing the capacitor intermediate including the erosion preventing layer and a lower region of the erosion preventing layer, and injecting an impurity in the first storage plate through the second storage plate to form a second doping region contacting the first doping region.
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