Invention Grant
US08669171B2 Method for eliminating the metal catalyst residues on the surface of wires produced by catalytic growth
失效
消除由催化生长产生的电线表面的金属催化剂残留物的方法
- Patent Title: Method for eliminating the metal catalyst residues on the surface of wires produced by catalytic growth
- Patent Title (中): 消除由催化生长产生的电线表面的金属催化剂残留物的方法
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Application No.: US13220395Application Date: 2011-08-29
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Publication No.: US08669171B2Publication Date: 2014-03-11
- Inventor: Simon Perraud , Philippe Coronel
- Applicant: Simon Perraud , Philippe Coronel
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atmoique et aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atmoique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Harris Beach PLLC
- Priority: FR1057595 20100922
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/36
Abstract:
A method is provided for eliminating catalyst residues that are present on the surface of solid structures. The solid structures are made from a first material and are obtained by catalytic growth from a substrate. The method includes the following steps: catalytically growing, from the catalyst residues, solid structures made from a second material; and selectively eliminating the solid structures made from the second material, thereby eliminating the catalyst residues.
Public/Granted literature
- US20120070964A1 METHOD FOR ELIMINATING THE METAL CATALYST RESIDUES ON THE SURFACE OF WIRES PRODUCED BY CATALYTIC GROWTH Public/Granted day:2012-03-22
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