Integrated circuits with decoupling capacitor circuitry are provided. Decoupling capacitor circuitry may include multiple arrays of decoupling capacitors. Each decoupling capacitor array may have a corresponding decoupling capacitor monitoring circuit that is associated with that decoupling capacitor array. Each decoupling capacitor monitoring circuit may include a resistor and switching circuitry. Each decoupling capacitor monitoring circuit may be coupled to a comparator and control circuitry. During testing, the control circuitry may configure each decoupling capacitor array for leakage current testing one at a time. If a decoupling capacitor array is determined to exhibit excessive leakage currents, that decoupling capacitor array will be marked as defective and will be disabled from use. If the decoupling capacitor array is determined to exhibit tolerable leakage currents, that decoupling capacitor array will be enable for use to help reduce power supply noise.