发明授权
- 专利标题: Procedure for in-situ determination of thermal gradients at the crystal growth front
- 专利标题(中): 在晶体生长前沿原位测定热梯度的程序
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申请号: US13434167申请日: 2012-03-29
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公开(公告)号: US08673075B2公开(公告)日: 2014-03-18
- 发明人: Benno Orschel , Andrzej Buczkowski , Joel Kearns , Keiichi Takanashi , Volker Todt
- 申请人: Benno Orschel , Andrzej Buczkowski , Joel Kearns , Keiichi Takanashi , Volker Todt
- 申请人地址: US AZ Phoenix JP Tokyo
- 专利权人: Sumco Phoenix Corporation,Sumco Corporation
- 当前专利权人: Sumco Phoenix Corporation,Sumco Corporation
- 当前专利权人地址: US AZ Phoenix JP Tokyo
- 代理机构: Brinks Gilson & Lione
- 主分类号: C30B15/22
- IPC分类号: C30B15/22
摘要:
A method and apparatus for growing a semiconductor crystal include pulling the semiconductor crystal from melt at a pull speed and modulating the pull speed by combining a periodic pull speed with an average speed. The modulation of the pull speed allows in-situ determination of characteristic temperature gradients in the melt and in the crystal during crystal formation. The temperature gradients may be used to control relevant process parameters that affect morphological stability or intrinsic material properties in the finished crystal such as for instance the target pull speed of the crystal or the melt gap, which determines the thermal gradient in the crystal during growth.
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