发明授权
- 专利标题: FinFET and method for manufacturing the same
- 专利标题(中): FinFET及其制造方法
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申请号: US13579192申请日: 2012-05-14
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公开(公告)号: US08673704B2公开(公告)日: 2014-03-18
- 发明人: Huilong Zhu , Wei He , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Wei He , Qingqing Liang , Haizhou Yin , Zhijiong Luo
- 申请人地址: CN Beijing
- 专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人: Institute of Microelectronics, Chinese Academy of Sciences
- 当前专利权人地址: CN Beijing
- 代理机构: Kinney & Lange, P.A.
- 优先权: CN201210141545 20120509
- 国际申请: PCT/CN2012/075437 WO 20120514
- 国际公布: WO2013/166733 WO 20131114
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A FinFET and a method for manufacturing the same are disclosed. The FinFET comprises an etching stop layer on a semiconductor substrate; a semiconductor fin on the etching stop layer; a gate conductor extending in a direction perpendicular to a length direction of the semiconductor fin and covering at least two side surfaces of the semiconductor fin; a gate dielectric layer between the gate conductor and the semiconductor fin; a source region and a drain region which are provided at two ends of the semiconductor fin respectively; and an interlayer insulating layer adjoining the etching stop layer below the gate dielectric layer, and separating the gate conductor from the etching stop layer and the semiconductor fin. A height of the fin of the FinFET is approximately equal to a thickness of a semiconductor layer for forming the semiconductor fin.
公开/授权文献
- US20130299885A1 FINFET AND METHOD FOR MANUFACTURING THE SAME 公开/授权日:2013-11-14
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