发明授权
- 专利标题: Method of producing thin film transistor and thin film transistor
- 专利标题(中): 薄膜晶体管和薄膜晶体管的制造方法
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申请号: US12808397申请日: 2008-12-12
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公开(公告)号: US08673705B2公开(公告)日: 2014-03-18
- 发明人: Taro Morimura , Toru Kikuchi , Masanori Hashimoto , Shin Asari , Kazuya Saito , Kyuzo Nakamura
- 申请人: Taro Morimura , Toru Kikuchi , Masanori Hashimoto , Shin Asari , Kazuya Saito , Kyuzo Nakamura
- 申请人地址: JP Kanagawa
- 专利权人: Ulvac, Inc.
- 当前专利权人: Ulvac, Inc.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Harness, Dickey & Pierce, PLC
- 优先权: JP2007-332774 20071225
- 国际申请: PCT/JP2008/072685 WO 20081212
- 国际公布: WO2009/081775 WO 20090702
- 主分类号: H01L21/84
- IPC分类号: H01L21/84
摘要:
[Object] To provide a method of producing a thin film transistor superior in productivity and capable of preventing variation in transistor characteristics among devices from occurring to improve carrier mobility, and a thin film transistor.[Solving Means] In a method of producing a thin-film transistor according to the present invention, a solid-state green laser is irradiated onto a channel portion of an amorphous silicon film using a source electrode film and a drain electrode film as masks, thereby improving mobility. Since the channel portion of the amorphous silicon film is crystallized by the irradiation of the solid-state green laser, laser oscillation characteristics can be more stable than in a conventional method that uses an excimer laser. Further, laser irradiation onto a large-size substrate at uniform output characteristics in plane becomes possible, with the result that a variation in crystallinity of channel portions among devices can be avoided. Moreover, since a maintenance cycle of a laser oscillator becomes longer, a downtime cost of the apparatus can be reduced and productivity can be improved.
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