Invention Grant
- Patent Title: Image sensor with reduced optical crosstalk
- Patent Title (中): 具有减少光学串扰的图像传感器
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Application No.: US13333885Application Date: 2011-12-21
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Publication No.: US08674283B2Publication Date: 2014-03-18
- Inventor: Francois Roy , Flavien Hirigoyen , Julien Michelot
- Applicant: Francois Roy , Flavien Hirigoyen , Julien Michelot
- Applicant Address: FR Crolles FR Montrouge
- Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee: STMicroelectronics (Crolles 2) SAS,STMicroelectronics SA
- Current Assignee Address: FR Crolles FR Montrouge
- Agency: Seed IP Law Group PLLC
- Priority: FR1005005 20101221
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
A method of fabricating an image sensor includes the steps of: forming at least two photosites in a semiconductor substrate; forming a trench between the photosites; forming a thin liner on at least the sidewalls of the trench; depositing a conductive material having a first refractive index in the trench; and forming a region surrounded by the conductive material and having a second refractive index lower than the first index of refraction within the conductive material in the trench.
Public/Granted literature
- US20120153128A1 IMAGE SENSOR WITH REDUCED OPTICAL CROSSTALK Public/Granted day:2012-06-21
Information query
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