Invention Grant
- Patent Title: Magnifying observation apparatus
- Patent Title (中): 放大观察装置
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Application No.: US13152353Application Date: 2011-06-03
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Publication No.: US08674301B2Publication Date: 2014-03-18
- Inventor: Shigenori Takagi
- Applicant: Shigenori Takagi
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2010-152536 20100702
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
Work to obtain an optical and an electron microscope images at an identical display size is facilitated. A magnifying observation apparatus includes: an electron beam imaging device that obtains an electron microscope image in a chamber; an optical imaging device that obtains an optical image in the chamber; a moving device that moves the both devices such that an optical axis direction of one of the both devices is aligned with an optical axis direction of the other device; a display section that displays the electron microscope and the optical images; and a magnifying power conversion section that recognizes a magnifying power of an image obtained by one of the imaging devices and converts the magnifying power, which is used to obtain an image having a display size substantially identical to that of the image, by the other device into a magnifying power on a basis of the other device.
Public/Granted literature
- US20120001070A1 Magnifying Observation Apparatus Public/Granted day:2012-01-05
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