Invention Grant
US08674413B1 Methods of forming fins and isolation regions on a FinFET semiconductor device 有权
在FinFET半导体器件上形成鳍片和隔离区域的方法

Methods of forming fins and isolation regions on a FinFET semiconductor device
Abstract:
One illustrative device disclosed herein includes a substantially un-doped layer of a semiconductor material positioned above a semiconducting substrate, a device isolation structure, at least a portion of which is positioned in a trench that extends through the substantially un-doped semiconductor material and into the substrate, a plurality of outer fins and at least one inner fin defined in the substantially un-doped layer of semiconductor material, wherein the at least one inner fin is positioned laterally between the plurality of outer fins and wherein a width of a bottom of each of the plurality of outer fins is greater than a width of a bottom of the inner fin, and a gate electrode positioned around at least a portion of the plurality of outer fins and the inner fin.
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