Invention Grant
US08674413B1 Methods of forming fins and isolation regions on a FinFET semiconductor device
有权
在FinFET半导体器件上形成鳍片和隔离区域的方法
- Patent Title: Methods of forming fins and isolation regions on a FinFET semiconductor device
- Patent Title (中): 在FinFET半导体器件上形成鳍片和隔离区域的方法
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Application No.: US13670605Application Date: 2012-11-07
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Publication No.: US08674413B1Publication Date: 2014-03-18
- Inventor: Min-hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
One illustrative device disclosed herein includes a substantially un-doped layer of a semiconductor material positioned above a semiconducting substrate, a device isolation structure, at least a portion of which is positioned in a trench that extends through the substantially un-doped semiconductor material and into the substrate, a plurality of outer fins and at least one inner fin defined in the substantially un-doped layer of semiconductor material, wherein the at least one inner fin is positioned laterally between the plurality of outer fins and wherein a width of a bottom of each of the plurality of outer fins is greater than a width of a bottom of the inner fin, and a gate electrode positioned around at least a portion of the plurality of outer fins and the inner fin.
Information query
IPC分类: