Invention Grant
- Patent Title: Plasma-generating structures and display devices
- Patent Title (中): 等离子体产生结构和显示装置
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Application No.: US13593280Application Date: 2012-08-23
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Publication No.: US08674602B2Publication Date: 2014-03-18
- Inventor: Neal R. Rueger , Stephen J. Kramer
- Applicant: Neal R. Rueger , Stephen J. Kramer
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01J17/49
- IPC: H01J17/49 ; H01J9/00

Abstract:
Some embodiments include methods of forming plasma-generating microstructures. Aluminum may be anodized to form an aluminum oxide body having a plurality of openings extending therethrough. Conductive liners may be formed within the openings, and circuitry may be formed to control current flow through the conductive liners. The conductive liners form a plurality of hollow cathodes, and the current flow is configured to generate and maintain plasmas within the hollow cathodes. The plasmas within various hollow cathodes, or sets of hollow cathodes, may be independently controlled. Such independently controlled plasmas may be utilized to create a pattern in a display, or on a substrate. In some embodiments, the plasmas may be utilized for plasma-assisted etching and/or plasma-assisted deposition. Some embodiments include constructions and assemblies containing multiple plasma-generating structures.
Public/Granted literature
- US20120313517A1 Plasma-Generating Structures and Display Devices Public/Granted day:2012-12-13
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