Invention Grant
US08679873B2 Method for fabricating oxide-confined vertical-cavity surface-emitting laser
有权
用于制造氧化物限制的垂直腔表面发射激光器的方法
- Patent Title: Method for fabricating oxide-confined vertical-cavity surface-emitting laser
- Patent Title (中): 用于制造氧化物限制的垂直腔表面发射激光器的方法
-
Application No.: US12653349Application Date: 2009-12-11
-
Publication No.: US08679873B2Publication Date: 2014-03-25
- Inventor: Jin Shan Pan , Cheng Ju Wu , I Han Wu , Kuo Fong Tseng
- Applicant: Jin Shan Pan , Cheng Ju Wu , I Han Wu , Kuo Fong Tseng
- Applicant Address: TW
- Assignee: TrueLight Corp.
- Current Assignee: TrueLight Corp.
- Current Assignee Address: TW
- Priority: TW98134059A 20091008
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00 ; H01S3/04 ; H01S5/00
Abstract:
The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer.
Public/Granted literature
- US20110086449A1 Method for fabricating oxide-confined vertical-cavity surface-emitting laser Public/Granted day:2011-04-14
Information query
IPC分类:
