公开(公告)号：US08679873B2

公开(公告)日：2014-03-25

申请号：US12653349

申请日：2009-12-11

Applicant: Jin Shan Pan ,  Cheng Ju Wu ,  I Han Wu ,  Kuo Fong Tseng

Inventor： Jin Shan Pan ,  Cheng Ju Wu ,  I Han Wu ,  Kuo Fong Tseng

IPC: H01L21/00 ,  H01L33/00 ,  H01S3/04 ,  H01S5/00

CPC classification number: H01S5/18313

Abstract: The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4 μm/min, and the passivation layer is a SiON passivation layer.

Abstract translation: 本发明公开了一种通过在VCSEL氧化过程中减慢氧化速率来制造耐热，耐湿氧化物的垂直腔表面发射激光器（VCSEL）的方法，从而降低氧化层的应力集中， 通过使用设置在激光窗口上的钝化层防止水分侵入。 这样制造的VCSEL器件是耐热，耐湿和高可靠性的。 在优选的实施方案中，氧化过程以小于0.4μm/ min的氧化速率进行，钝化层是SiON钝化层。