发明授权
- 专利标题: Local charge and work function engineering on MOSFET
- 专利标题(中): MOSFET的局部充电和工作功能工程
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申请号: US13232154申请日: 2011-09-14
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公开(公告)号: US08679926B2公开(公告)日: 2014-03-25
- 发明人: Huan-Tsung Huang , Shyh-Horng Yang , Yuri Masuoka , Ken-Ichi Goto
- 申请人: Huan-Tsung Huang , Shyh-Horng Yang , Yuri Masuoka , Ken-Ichi Goto
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Hayes and Boone, LLP
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor substrate having a source region and a drain region, defining a first dimension from the source to drain; and a gate stack disposed on the semiconductor substrate and partially interposed between the source region and the drain region. The gate stack includes a high k dielectric layer disposed on the semiconductor substrate; a first metal feature disposed on the high k dielectric layer, the first metal gate feature having a first work function and defining a second dimension parallel with the first dimension; and a second metal feature having a second work function different from the first work function and defining a third dimension parallel with the first dimension, the third dimension being less than the second dimension.
公开/授权文献
- US20120003804A1 Local Charge and Work Function Engineering on MOSFET 公开/授权日:2012-01-05
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