Invention Grant
US08679948B2 Method and apparatus for laser singulation of brittle materials 有权
用于激光切割脆性材料的方法和装置

Method and apparatus for laser singulation of brittle materials
Abstract:
An improved method for singulation of electronic substrates into dice uses a laser to first form cuts in the substrate and then chamfers the edges of the cuts by altering the laser parameters. The chamfers increase die break strength by reducing the residual damage and removes debris caused by the initial laser cut without requiring additional process steps, additional equipment or consumable supplies.
Public/Granted literature
Information query
Patent Agency Ranking
0/0