Invention Grant
- Patent Title: Method and apparatus for laser singulation of brittle materials
- Patent Title (中): 用于激光切割脆性材料的方法和装置
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Application No.: US13774244Application Date: 2013-02-22
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Publication No.: US08679948B2Publication Date: 2014-03-25
- Inventor: Yasu Osako , Daragh Finn
- Applicant: Electro Scientific, Industries, Inc.
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc
- Current Assignee: Electro Scientific Industries, Inc
- Current Assignee Address: US OR Portland
- Main IPC: B23K26/00
- IPC: B23K26/00

Abstract:
An improved method for singulation of electronic substrates into dice uses a laser to first form cuts in the substrate and then chamfers the edges of the cuts by altering the laser parameters. The chamfers increase die break strength by reducing the residual damage and removes debris caused by the initial laser cut without requiring additional process steps, additional equipment or consumable supplies.
Public/Granted literature
- US20130237035A1 METHOD AND APPARATUS FOR LASER SINGULATION OF BRITTLE MATERIALS Public/Granted day:2013-09-12
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