发明授权
- 专利标题： Removing a sheet from the surface of a melt using gas jets
- 专利标题（中）： 使用气体喷射从熔体表面去除片材
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申请号： US13037789申请日： 2011-03-01
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公开(公告)号： US08685162B2公开(公告)日： 2014-04-01
- 发明人: Peter L. Kellerman , Gregory D. Thronson , Dawei Sun
- 申请人： Peter L. Kellerman , Gregory D. Thronson , Dawei Sun
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： C30B15/22
- IPC分类号： C30B15/22 ; C30B9/00 ; C30B15/00 ; C30B15/06 ; C30B15/24 ; C30B15/34
摘要：
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.