发明授权
- 专利标题: Method for optimizing wafer edge patterning
- 专利标题(中): 优化晶片边缘图案化的方法
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申请号: US10929706申请日: 2004-08-30
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公开(公告)号: US08685633B2公开(公告)日: 2014-04-01
- 发明人: Duane B. Barber , David J. Sturtevant
- 申请人: Duane B. Barber , David J. Sturtevant
- 申请人地址: US CA San Jose
- 专利权人: LSI Corporation
- 当前专利权人: LSI Corporation
- 当前专利权人地址: US CA San Jose
- 代理机构: Clark Hill PLC
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
A method of printing an image on a wafer. The method includes the steps of printing a main image, wherein the main image includes fields which are fully on the wafer, and printing an alternate image, wherein the alternate image includes fields which are only partially on the wafer. The alternate image could be placed on a separate mask which is loaded onto the exposure tool after the mask with the main image has completed printing. Alternatively, it could be an extra image specially inserted on the mask with the main image for that layer.
公开/授权文献
- US20060046213A1 Method for optimizing wafer edge patterning 公开/授权日:2006-03-02
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