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US08685633B2 Method for optimizing wafer edge patterning 失效
优化晶片边缘图案化的方法

Method for optimizing wafer edge patterning
摘要:
A method of printing an image on a wafer. The method includes the steps of printing a main image, wherein the main image includes fields which are fully on the wafer, and printing an alternate image, wherein the alternate image includes fields which are only partially on the wafer. The alternate image could be placed on a separate mask which is loaded onto the exposure tool after the mask with the main image has completed printing. Alternatively, it could be an extra image specially inserted on the mask with the main image for that layer.
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