Invention Grant
US08686390B2 Nonvolatile memory element having a variable resistance layer whose resistance value changes according to an applied electric signal
有权
具有可变电阻层的非易失性存储元件,其电阻值根据所施加的电信号而改变
- Patent Title: Nonvolatile memory element having a variable resistance layer whose resistance value changes according to an applied electric signal
- Patent Title (中): 具有可变电阻层的非易失性存储元件,其电阻值根据所施加的电信号而改变
-
Application No.: US13512178Application Date: 2010-11-18
-
Publication No.: US08686390B2Publication Date: 2014-04-01
- Inventor: Takeshi Takagi
- Applicant: Takeshi Takagi
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2009-271373 20091130
- International Application: PCT/JP2010/006767 WO 20101118
- International Announcement: WO2011/064967 WO 20110603
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
Provided is a nonvolatile memory element achieving a stable resistance change and miniaturization, and a method of manufacturing the same. The nonvolatile memory element includes: a first electrode formed above a substrate; an interlayer insulating layer formed above the substrate including the first electrode and having a memory cell hole reaching the first electrode; a barrier layer formed in the memory cell hole and composed of a semiconductor layer or an insulating layer connected to the first electrode; a second electrode formed in the memory cell hole and connected to the barrier layer; a variable resistance layer formed on the second electrode and having a stacked structure whose resistance value changes based on electric signals; and a third electrode connected to the variable resistance layer and formed on the interlayer insulating layer to cover the memory cell hole.
Public/Granted literature
- US20120280199A1 NONVOLATILE MEMORY ELEMENT, METHOD OF MANUFACTURING THE SAME, AND NONVOLATILE MEMORY DEVICE Public/Granted day:2012-11-08
Information query
IPC分类: