发明授权
- 专利标题: Semiconductor constructions and memory arrays
- 专利标题(中): 半导体结构和存储器阵列
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申请号: US13551873申请日: 2012-07-18
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公开(公告)号: US08686394B2公开(公告)日: 2014-04-01
- 发明人: Fabio Pellizzer , Cinzia Perrone
- 申请人: Fabio Pellizzer , Cinzia Perrone
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
Some embodiments include methods of forming semiconductor constructions. Carbon-containing material is formed over oxygen-sensitive material. The carbon-containing material and oxygen-sensitive material together form a structure having a sidewall that extends along both the carbon-containing material and the oxygen-sensitive material. First protective material is formed along the sidewall. The first protective material extends across an interface of the carbon-containing material and the oxygen-sensitive material, and does not extend to a top region of the carbon-containing material. Second protective material is formed across the top of the carbon-containing material, with the second protective material having a common composition to the first protective material. The second protective material is etched to expose an upper surface of the carbon-containing material. Some embodiments include semiconductor constructions, memory arrays and methods of forming memory arrays.
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