Invention Grant
US08691640B1 Methods of forming dielectrically isolated fins for a FinFET semiconductor by performing an etching process wherein the etch rate is modified via inclusion of a dopant material
有权
通过进行蚀刻工艺形成用于FinFET半导体的介电隔离鳍片的方法,其中蚀刻速率通过掺杂材料
- Patent Title: Methods of forming dielectrically isolated fins for a FinFET semiconductor by performing an etching process wherein the etch rate is modified via inclusion of a dopant material
- Patent Title (中): 通过进行蚀刻工艺形成用于FinFET半导体的介电隔离鳍片的方法,其中蚀刻速率通过掺杂材料
-
Application No.: US13745927Application Date: 2013-01-21
-
Publication No.: US08691640B1Publication Date: 2014-04-08
- Inventor: Nicholas V. LiCausi , Jeremy A. Wahl
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
One illustrative method disclosed herein includes forming a plurality of trenches in a semiconductor substrate to thereby define an initial fin structure, forming sidewall spacers adjacent the initial fin structure, wherein the spacers cover a first portion of the initial fin structure and expose a second a portion of the initial fin structure, performing a doping process to form N-type doped regions in at least the exposed portion of the initial fin structure, and performing an etching process to remove at least a portion of the doped regions and thereby define a final fin structure that is vertically spaced apart from the substrate.
Information query
IPC分类: