发明授权
- 专利标题: Laser beam positioning system
- 专利标题(中): 激光束定位系统
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申请号: US13076231申请日: 2011-03-30
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公开(公告)号: US08692151B2公开(公告)日: 2014-04-08
- 发明人: Leonid M. Tertitski , Krishna Kumar Kuttannair , Aaron Muir Hunter , Stephen Moffatt
- 申请人: Leonid M. Tertitski , Krishna Kumar Kuttannair , Aaron Muir Hunter , Stephen Moffatt
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.
公开/授权文献
- US20110239421A1 LASER BEAM POSITIONING SYSTEM 公开/授权日:2011-10-06
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