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公开(公告)号：US20110239421A1
公开(公告)日：2011-10-06
申请号：US13076231
申请日：2011-03-30
CPC分类号： B23K26/127 , B23K26/0006 , B23K26/0823 , B23K26/0876 , B23K26/12 , B23K26/352 , B23K2101/40 , B23K2103/52 , B23K2103/56 , Y10T29/41
摘要： A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.
摘要翻译： 提供了一种用于瞄准辐射束的方法和装置。 光束导向镜和光束捕获镜沿着光学路径可移动地设置。 控制器将光束导向反射镜和光束捕获镜移动到x-y平面中，并且使反射镜旋转以将光束瞄准到表面上的目标位置，同时保持光学表面上的所有目标位置的光程长度基本恒定。 该表面由旋转致动器旋转以将所有目标位置移动到由光束瞄准光学器件接近的位置。 可以通过在光束入口点处提供致动孔径和/或具有光学测距探测器的可变焦距透镜来全部与控制器通信来补偿瞄准和光路长度的不精确性。
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公开(公告)号：US08692151B2
公开(公告)日：2014-04-08
申请号：US13076231
申请日：2011-03-30
IPC分类号： H01L21/00
CPC分类号： B23K26/127 , B23K26/0006 , B23K26/0823 , B23K26/0876 , B23K26/12 , B23K26/352 , B23K2101/40 , B23K2103/52 , B23K2103/56 , Y10T29/41
摘要： A method and apparatus for targeting a beam of radiation is provided. A beam steering mirror and a beam capture mirror are movably disposed along an optical pathway. A controller moves the beam steering mirror and the beam capture mirror in an x-y plane, and rotates the mirrors, to target the beam to a target location on a surface, while keeping the optical path length substantially constant for all target locations on the surface. The surface is rotated by a rotational actuator to bring all target locations to positions accessible by the beam targeting optics. Imprecision in targeting and optical path length may be compensated by providing an actuated aperture at the beam entry point and/or a variable focus lens with an optical range finding detector, all in communication with the controller.
摘要翻译： 提供了一种用于瞄准辐射束的方法和装置。 光束导向镜和光束捕获镜沿着光学路径可移动地设置。 控制器将光束导向反射镜和光束捕获镜移动到x-y平面中，并且使反射镜旋转以将光束瞄准到表面上的目标位置，同时保持光学表面上的所有目标位置的光程长度基本恒定。 该表面由旋转致动器旋转以将所有目标位置移动到由光束瞄准光学器件接近的位置。 可以通过在光束入口点处提供致动孔径和/或具有光学测距探测器的可变焦距透镜来全部与控制器通信来补偿瞄准和光路长度的不精确性。
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