Invention Grant
US08695425B2 Yaw rate sensor 有权
偏航率传感器

  • Patent Title: Yaw rate sensor
  • Patent Title (中): 偏航率传感器
  • Application No.: US13138102
    Application Date: 2009-12-03
  • Publication No.: US08695425B2
    Publication Date: 2014-04-15
  • Inventor: Johannes Classen
  • Applicant: Johannes Classen
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102009000345 20090121
  • International Application: PCT/EP2009/066302 WO 20091203
  • International Announcement: WO2010/083918 WO 20100729
  • Main IPC: G01C19/56
  • IPC: G01C19/56
Yaw rate sensor
Abstract:
A yaw rate sensor includes a substrate having a substrate surface, a first movable element, which is disposed above the substrate surface and has a drive frame and a first detection mass, a first electrode, which is disposed at a distance underneath the first detection mass and connected to the substrate surface, and a second electrode which is disposed at a distance above the first detection mass and connected to the substrate surface. The drive frame is connected to the substrate via at least one drive spring, the detection mass is connected to the drive frame via at least one detection spring, and the first movable element is excitable to a drive oscillation parallel to the substrate surface, and the first detection mass is deflectable perpendicular to the substrate surface.
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