Invention Grant
US08701268B2 Composite showerhead electrode assembly for a plasma processing apparatus
有权
用于等离子体处理装置的复合喷头电极组件
- Patent Title: Composite showerhead electrode assembly for a plasma processing apparatus
- Patent Title (中): 用于等离子体处理装置的复合喷头电极组件
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Application No.: US13828176Application Date: 2013-03-14
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Publication No.: US08701268B2Publication Date: 2014-04-22
- Inventor: Dean Jay Larson , Tom Stevenson , Victor Wang
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H01S4/00
- IPC: H01S4/00 ; B23P17/04 ; B23P19/00 ; H01L21/306 ; C23F1/00

Abstract:
A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery.
Public/Granted literature
- US20130244441A1 COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APPARATUS Public/Granted day:2013-09-19
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