Invention Grant
US08701268B2 Composite showerhead electrode assembly for a plasma processing apparatus 有权
用于等离子体处理装置的复合喷头电极组件

Composite showerhead electrode assembly for a plasma processing apparatus
Abstract:
A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery.
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