Invention Grant
- Patent Title: Inertial sensor
- Patent Title (中): 惯性传感器
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Application No.: US13213948Application Date: 2011-08-19
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Publication No.: US08701489B2Publication Date: 2014-04-22
- Inventor: Jong Woon Kim , Jung Won Lee , Seung Hun Han , Won Kyu Jeung , Yun Sung Kang , Heung Woo Park
- Applicant: Jong Woon Kim , Jung Won Lee , Seung Hun Han , Won Kyu Jeung , Yun Sung Kang , Heung Woo Park
- Applicant Address: KR Gyunggi-Do
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Gyunggi-Do
- Agency: Bracewell & Giuliani LLP
- Agent Brad Y. Chin
- Priority: KR10-2011-0050201 20110526
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P1/02

Abstract:
Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.
Public/Granted literature
- US20120297874A1 INERTIAL SENSOR Public/Granted day:2012-11-29
Information query
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