发明授权
- 专利标题: Method for forming pattern and developer
- 专利标题(中): 形成图案和显影剂的方法
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申请号: US13177487申请日: 2011-07-06
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公开(公告)号: US08703401B2公开(公告)日: 2014-04-22
- 发明人: Taiichi Furukawa , Hirokazu Sakakibara
- 申请人: Taiichi Furukawa , Hirokazu Sakakibara
- 申请人地址: JP Tokyo
- 专利权人: JSR Corporation
- 当前专利权人: JSR Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 优先权: JP2011-123697 20110601
- 主分类号: G03F7/26
- IPC分类号: G03F7/26
摘要:
A pattern-forming method includes forming a resist film on a substrate using a photoresist composition, exposing the resist film, and developing the exposed resist film using a negative developer that includes an organic solvent. The photoresist composition includes (A) a polymer that includes a structural unit (I) including an acid-labile group that dissociates due to an acid, the solubility of the polymer in the developer decreasing upon dissociation of the acid-labile group, and (B) a photoacid generator. The developer includes a nitrogen-containing compound.
公开/授权文献
- US20120308938A1 METHOD FOR FORMING PATTERN AND DEVELOPER 公开/授权日:2012-12-06
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