Invention Grant
- Patent Title: Three-dimensional multi-bit non-volatile memory and method for manufacturing the same
- Patent Title (中): 三维多位非易失性存储器及其制造方法
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Application No.: US13376925Application Date: 2011-06-30
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Publication No.: US08705274B2Publication Date: 2014-04-22
- Inventor: Ming Liu , Chenxi Zhu , Zongliang Huo , Feng Yan , Qin Wang , Shibing Long
- Applicant: Ming Liu , Chenxi Zhu , Zongliang Huo , Feng Yan , Qin Wang , Shibing Long
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201010223354 20100630; CN201010223356 20100630
- International Application: PCT/CN2011/076632 WO 20110630
- International Announcement: WO2012/000442 WO 20120105
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L21/336

Abstract:
The present disclosure relates to the field of microelectronics manufacture and memories. A three-dimensional multi-bit non-volatile memory and a method for manufacturing the same are disclosed. The memory comprises a plurality of memory cells constituting a memory array. The memory array may comprise: a gate stack structure; periodically and alternately arranged gate stack regions and channel region spaces; gate dielectric layers for discrete charge storage; periodically arranged channel regions; source doping regions and drain doping regions symmetrically arranged to each other; bit lines led from the source doping regions and the drain doping regions; and word lines led from the gate stack regions. The gate dielectric layers for discrete charge storage can provide physical storage spots to achieve single-bit or multi-bit operations, so as to achieve a high storage density. According to the present disclosure, the localized charge storage characteristic of the charge trapping layer and characteristics such as a longer effective channel length and a higher density of a vertical memory structure are utilized, to provide multiple storage spots in a single memory cell. Therefore, the storage density is improved while good performances such as high speed are ensured.
Public/Granted literature
- US20120275220A1 THREE-DIMENSIONAL MULTI-BIT NON-VOLATILE MEMORY AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-11-01
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