Invention Grant
US08709264B2 Planar cavity MEMS and related structures, methods of manufacture and design structures
有权
平面腔MEMS及相关结构，制造方法和设计结构
- Patent Title: Planar cavity MEMS and related structures, methods of manufacture and design structures
- Patent Title (中): 平面腔MEMS及相关结构，制造方法和设计结构
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Application No.: US12973235Application Date: 2010-12-20
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Publication No.: US08709264B2Publication Date: 2014-04-29
- Inventor: Christopher V. Jahnes , Anthony K. Stamper
- Applicant: Christopher V. Jahnes , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: C23F1/00
- IPC: C23F1/00
Abstract:
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
Public/Granted literature
- US20110315526A1 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES Public/Granted day:2011-12-29
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