发明授权
US08710635B2 Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
有权
在半导体管芯之间形成不连续的ESD保护层的半导体器件和方法
- 专利标题: Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
- 专利标题(中): 在半导体管芯之间形成不连续的ESD保护层的半导体器件和方法
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申请号: US13560008申请日: 2012-07-27
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公开(公告)号: US08710635B2公开(公告)日: 2014-04-29
- 发明人: Reza A. Pagaila , Jose A. Caparas , Pandi C. Marimuthu
- 申请人: Reza A. Pagaila , Jose A. Caparas , Pandi C. Marimuthu
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Ltd.
- 当前专利权人: STATS ChipPAC, Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins & Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/552
- IPC分类号: H01L23/552 ; H01L21/00
摘要:
A semiconductor wafer has a plurality of semiconductor die separated by a saw street. The wafer is mounted to dicing tape. The wafer is singulated through the saw street to expose side surfaces of the semiconductor die. An ESD protection layer is formed over the semiconductor die and around the exposed side surfaces of the semiconductor die. The ESD protection layer can be a metal layer, encapsulant film, conductive polymer, conductive ink, or insulating layer covered by a metal layer. The ESD protection layer is singulated between the semiconductor die. The semiconductor die covered by the ESD protection layer are mounted to a temporary carrier. An encapsulant is deposited over the ESD protection layer covering the semiconductor die. The carrier is removed. An interconnect structure is formed over the semiconductor die and encapsulant. The ESD protection layer is electrically connected to the interconnect structure to provide an ESD path.
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