发明授权
- 专利标题： Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus
- 专利标题（中）： 双真空泵装置，具有双真空泵装置的气体净化系统和双真空泵装置中的废气振动抑制装置
-
申请号： US13518257申请日： 2010-12-22
-
公开(公告)号： US08715400B2公开(公告)日： 2014-05-06
- 发明人: Kazuo Haruna , Kiyokazu Maruta , Hidenori Kuwata , Koichi Shima
- 申请人： Kazuo Haruna , Kiyokazu Maruta , Hidenori Kuwata , Koichi Shima
- 申请人地址： JP Hyogo
- 专利权人： Sumitomo Seiko Chemicals Co., Ltd.
- 当前专利权人： Sumitomo Seiko Chemicals Co., Ltd.
- 当前专利权人地址： JP Hyogo
- 代理机构： Hamre, Schumann, Mueller & Larson, P.C.
- 优先权： JP2009-291796 20091224; JP2010-223841 20101001
- 国际申请： PCT/JP2010/073091 WO 20101222
- 国际公布： WO2011/078207 WO 20110630
- 主分类号： B01D53/02
- IPC分类号： B01D53/02 ; F04B41/06 ; F04B37/14 ; F04B37/16 ; B01D53/04 ; B01D53/047
摘要：
A double vacuum pump apparatus (Y2) includes positive displacement vacuum pumps (40A, 40B) and lines (52, 60). Each of the vacuum pumps includes a suction port (41) and a discharge port (42), and a pressure detector (80) is provided in the vicinity of the suction port (41) of the double vacuum pump apparatus (Y2). The line (52) connects the discharge port (42) of the vacuum pump (40A) to the suction port (41) of the vacuum pump (40B). The line (60) has an end (E6) and an end (E5) that are connected to the connection line (52), and includes a buffer tube (Z1) and an on-off valve (61) located between the tube (Z1) and the end (E5). A pressure detection signal from the pressure detector (80) is used as an on/off signal for the on-off valve (61).
公开/授权文献
信息查询
IPC分类:
