发明授权
- 专利标题: Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric device
- 专利标题(中): 液体喷射头,液体喷射装置和压电装置
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申请号: US13094490申请日: 2011-04-26
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公开(公告)号: US08721055B2公开(公告)日: 2014-05-13
- 发明人: Toshihiro Shimizu , Hiroshi Ito , Jiro Kato , Eiju Hirai
- 申请人: Toshihiro Shimizu , Hiroshi Ito , Jiro Kato , Eiju Hirai
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Workman Nydegger
- 优先权: JP2010-101925 20100427
- 主分类号: B41J2/045
- IPC分类号: B41J2/045
摘要:
There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.
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