公开(公告)号：US08819903B2

公开(公告)日：2014-09-02

申请号：US13197464

申请日：2011-08-03

申请人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

发明人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

IPC分类号： H04R17/00 ,  H01L41/29 ,  B41J2/16 ,  H01L41/314 ,  B41J2/14

CPC分类号： H01L41/29 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14491 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49401

摘要： A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.

摘要翻译： 压电元件的制造方法包括：在基板上形成第一导电层; 在所述第一导电层上形成压电层; 在所述压电层上形成第二导电层; 在所述第二导电层上形成第三导电层; 通过对第三导电层进行构图而形成第一部分，第二部分和设置在第一部分和第二部分之间的开口部分; 形成覆盖所述开口部并且覆盖所述第一部分和面向所述开口部侧的所述第二部分的边缘的抗蚀剂层; 以及形成由所述第一部分和所述第二部分构成的第一导电部分和第二导电部分，以及通过使用所述第一部分干蚀刻所述第二导电层，形成由所述第二导电层构成的第三导电部分，所述第二部分 ，抗蚀剂层作为掩模。

公开(公告)号：US08721055B2

公开(公告)日：2014-05-13

申请号：US13094490

申请日：2011-04-26

申请人： Toshihiro Shimizu ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai

发明人： Toshihiro Shimizu ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/045 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491 ,  H01L27/20 ,  H01L41/047 ,  H01L41/0475 ,  H01L41/0477 ,  H01L41/0973

摘要： There is provided a piezoelectric device comprising a first electrode, a piezoelectric layer that is formed above the first electrode, a second electrode that is formed above the piezoelectric layer and a coating layer that is formed above the second electrode consisting of tungsten or titanium.

摘要翻译： 提供了一种压电装置，其包括第一电极，形成在第一电极上方的压电层，形成在压电层上方的第二电极和形成在由钨或钛构成的第二电极上方的涂层。

公开(公告)号：US08262203B2

公开(公告)日：2012-09-11

申请号：US13177217

申请日：2011-07-06

申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2202/18

摘要： A liquid ejecting head comprising: a pressure generating chamber substrate having pressure generating chambers; and a piezoelectric element including first conductive layer, piezoelectric layer, and a second conductive layer provided above the pressure generating chamber substrate, wherein the piezoelectric element includes overlapped areas where the pressure generating chamber and the piezoelectric element overlap one another in plan view, the first conductive layer has a longitudinal direction in a first direction and a second direction orthogonal to the first direction and are provided for each of the overlapped areas, the second conductive layer is provided continuously so as to overlap with a plurality of the pressure generating chambers and includes end areas on the side of the ends of the overlapped areas in the first direction, and the end areas are each reduced in width in the second direction as it goes toward the end in the first direction.

摘要翻译： 一种液体喷射头，包括：具有压力产生室的压力产生室基底; 以及包括第一导电层，压电层和设置在压力发生室基板上方的第二导电层的压电元件，其中压电元件包括​​在平面图中压力发生室和压电元件彼此重叠的重叠区域，第一 导电层具有沿第一方向的纵向方向和与第一方向正交的第二方向，并且为每个重叠区域设置，第二导电层连续设置成与多个压力发生室重叠，并且包括 在第一方向的重叠区域的端部的一侧的端部区域，并且端部区域在朝向第一方向的端部沿第二方向各自减小宽度。

公开(公告)号：US20120007929A1

公开(公告)日：2012-01-12

申请号：US13178378

申请日：2011-07-07

申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2202/18

摘要： A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.

摘要翻译： 一种液体喷射头，包括：压力室基板，其中设置有与喷嘴孔连通的压力室;以及压电元件，包括第一导电层，压电材料层和第二导电层，其中压电元件具有重叠区域 其与所述压力室，所述第一导电层，所述压电材料层和所述第二导电层重叠，其中所述第二导电层连续地与多个所述压力室重叠，其中，所述第一导电层设置在每个所述重叠区域 并且在纵向方向上的重叠区域的一端侧具有端部区域，并且其中当端部区域指向纵向方向的末端时，端部区域的宽度在横向方向上变窄。

公开(公告)号：US20120030915A1

公开(公告)日：2012-02-09

申请号：US13197464

申请日：2011-08-03

申请人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

发明人： Toshihiro Shimizu ,  Jiro Kato ,  Eiju Hirai ,  Hiroshi Ito

IPC分类号： H01L41/22

CPC分类号： H01L41/29 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/14491 ,  H01L41/314 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49401

摘要： A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.

摘要翻译： 压电元件的制造方法包括：在基板上形成第一导电层; 在所述第一导电层上形成压电层; 在所述压电层上形成第二导电层; 在所述第二导电层上形成第三导电层; 通过对第三导电层进行构图而形成第一部分，第二部分和设置在第一部分和第二部分之间的开口部分; 形成覆盖所述开口部并且覆盖所述第一部分和面向所述开口部侧的所述第二部分的边缘的抗蚀剂层; 以及形成由所述第一部分和所述第二部分构成的第一导电部分和第二导电部分，以及通过使用所述第一部分干蚀刻所述第二导电层，形成由所述第二导电层构成的第三导电部分，所述第二部分 ，抗蚀剂层作为掩模。

公开(公告)号：US08914955B2

公开(公告)日：2014-12-23

申请号：US13178389

申请日：2011-07-07

申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

IPC分类号： H04R17/00 ,  H01L41/332 ,  B41J2/14 ,  B41J2/16 ,  H01L41/29

CPC分类号： H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/29 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region, a process for forming a second conductive layer, which overlaps with the region, a process for forming a third conductive layer, which overlaps with the region, on the second conductive layer, a process for forming an opening portion that divides the third conductive layer into a first portion and a second portion, a process for forming a resist layer that covers the opening portion and a peripheral portion at the side of the opening portion of the first portion and the second portion; a process for etching the third conductive layer to form a first conductive portion and a second conductive portion, and a process for etching the second conductive layer to form a third conductive portion.

摘要翻译： 压电元件的制造方法包括形成第一导电层的工序，形成具有作为有源区的区域的压电层的工序，与该区域重叠的第二导电层的形成工序，工序 用于在所述第二导电层上形成与所述区域重叠的第三导电层，形成将所述第三导电层分成第一部分和第二部分的开口部分的工艺，形成覆盖所述第三导电层的抗蚀剂层的工艺 所述开口部分和在所述第一部分的开口部分和所述第二部分的一侧的周边部分; 用于蚀刻第三导电层以形成第一导电部分和第二导电部分的工艺，以及用于蚀刻第二导电层以形成第三导电部分的工艺。

公开(公告)号：US08752938B2

公开(公告)日：2014-06-17

申请号：US12974800

申请日：2010-12-21

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Eiju Hirai ,  Toshihiro Shimizu

IPC分类号： B41J2/045

CPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/14233 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.

摘要翻译： 液体喷射头包括具有压力产生室的流路形成基板，该压力产生室与喷嘴开口连通并且沿着横向方向平行布置。 压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。 在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是压电层的实质驱动部分的非活动部分之间的边界中，第一电极包括锥形部分 宽度从有效部分侧朝向边界逐渐减小。

公开(公告)号：US08459783B2

公开(公告)日：2013-06-11

申请号：US13178378

申请日：2011-07-07

申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2202/18

摘要： A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.

摘要翻译： 一种液体喷射头，包括：压力室基板，其中设置有与喷嘴孔连通的压力室;以及压电元件，包括第一导电层，压电材料层和第二导电层，其中压电元件具有重叠区域 其与所述压力室，所述第一导电层，所述压电材料层和所述第二导电层重叠，其中所述第二导电层连续地与多个所述压力室重叠，其中，所述第一导电层设置在每个所述重叠区域 并且在纵向方向上的重叠区域的一端侧具有端部区域，并且其中当端部区域指向纵向方向的末端时，端部区域的宽度在横向方向上变窄。

公开(公告)号：US20120007928A1

公开(公告)日：2012-01-12

申请号：US13177217

申请日：2011-07-06

申请人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

发明人： Eiju Hirai ,  Hiroshi Ito ,  Toshihiro Shimizu ,  Jiro Kato

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2202/18

摘要： A liquid ejecting head comprising: a pressure generating chamber substrate having pressure generating chambers; and a piezoelectric element including first conductive layer, piezoelectric layer, and a second conductive layer provided above the pressure generating chamber substrate, wherein the piezoelectric element includes overlapped areas where the pressure generating chamber and the piezoelectric element overlap one another in plan view, the first conductive layer has a longitudinal direction in a first direction and a second direction orthogonal to the first direction and are provided for each of the overlapped areas, the second conductive layer is provided continuously so as to overlap with a plurality of the pressure generating chambers and includes end areas on the side of the ends of the overlapped areas in the first direction, and the end areas are each reduced in width in the second direction as it goes toward the end in the first direction.

摘要翻译： 一种液体喷射头，包括：具有压力产生室的压力产生室基底; 以及包括第一导电层，压电层和设置在压力发生室基板上方的第二导电层的压电元件，其中压电元件包括​​在平面图中压力发生室和压电元件彼此重叠的重叠区域，第一 导电层具有沿第一方向的纵向方向和与第一方向正交的第二方向，并且为每个重叠区域设置，第二导电层连续设置成与多个压力发生室重叠，并且包括 在第一方向的重叠区域的端部的一侧的端部区域，并且端部区域在朝向第一方向的端部沿第二方向各自减小宽度。

公开(公告)号：US08636341B2

公开(公告)日：2014-01-28

申请号：US12974851

申请日：2010-12-21

申请人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Toshihiro Shimizu

发明人： Hiromu Miyazawa ,  Hiroshi Ito ,  Jiro Kato ,  Toshihiro Shimizu

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/055 ,  B41J2002/14241 ,  B41J2002/14419 ,  B41J2002/14491

摘要： A liquid ejecting head includes a flow channel forming substrate having a pressure generation chamber communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chamber, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer of the first electrode, an opening group is provided including at least one opening in the active section and the inactive section.

摘要翻译： 液体喷射头包括具有与喷嘴开口连通并沿着横向平行设置的压力产生室的流路形成基板。 压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。 在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是第一电极的压电层的实质驱动部分的非活动部分之间的边界中，开口组是 提供在活动部分和非活动部分中包括至少一个开口。