Invention Grant
US08721910B2 Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
有权
用于制造用于喷雾装置的MEMS技术中的喷嘴集成膜的方法和使用这种膜的喷涂装置的方法
- Patent Title: Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device and spray device using such membrane
- Patent Title (中): 用于制造用于喷雾装置的MEMS技术中的喷嘴集成膜的方法和使用这种膜的喷涂装置的方法
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Application No.: US13754510Application Date: 2013-01-30
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Publication No.: US08721910B2Publication Date: 2014-05-13
- Inventor: Angelo Antonio Merassi , Angelo Pesci , Benedetto Vigna , Ernestino Galeazzi , Marco Mantovani
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2008A000980 20081223
- Main IPC: B44C1/22
- IPC: B44C1/22
Abstract:
A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.
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