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US08722481B2 Superior integrity of high-k metal gate stacks by preserving a resist material above end caps of gate electrode structures 有权
通过在栅极电极结构的端盖上方保留抗蚀材料,可以实现高k金属栅极叠层的完整性

Superior integrity of high-k metal gate stacks by preserving a resist material above end caps of gate electrode structures
Abstract:
When forming high-k metal gate electrode structures in a semiconductor device on the basis of a basic transistor design, undue exposure of sensitive materials at end portions of the gate electrode structures of N-channel transistors may be avoided, for instance, prior to and upon incorporating a strain-inducing semiconductor material into the active region of P-channel transistors, thereby contributing to superior production yield for predefined transistor characteristics and performance.
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