Invention Grant
- Patent Title: Silicon interposer including backside inductor
- Patent Title (中): 硅插入器包括背面电感
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Application No.: US13493458Application Date: 2012-06-11
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Publication No.: US08723292B2Publication Date: 2014-05-13
- Inventor: Hyun-Cheol Bae , Kwang-Seong Choi , Jong Tae Moon , Jong-Moon Park
- Applicant: Hyun-Cheol Bae , Kwang-Seong Choi , Jong Tae Moon , Jong-Moon Park
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2011-0102108 20111006
- Main IPC: H01L27/08
- IPC: H01L27/08

Abstract:
Disclosed is a silicon interposer that can reduce the entire area of a semiconductor package and increase the degree of integration by forming inductors at a lower part in addition to an upper part of a silicon substrate. The silicon interposer includes a silicon substrate, an upper inductor layer formed at the upper part of the silicon substrate and a lower inductor layer formed at the lower part of the silicon substrate.
Public/Granted literature
- US20130087884A1 SILICON INTERPOSER INCLUDING BACKSIDE INDUCTOR Public/Granted day:2013-04-11
Information query
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