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US08723292B2 Silicon interposer including backside inductor 失效
硅插入器包括背面电感

Silicon interposer including backside inductor
Abstract:
Disclosed is a silicon interposer that can reduce the entire area of a semiconductor package and increase the degree of integration by forming inductors at a lower part in addition to an upper part of a silicon substrate. The silicon interposer includes a silicon substrate, an upper inductor layer formed at the upper part of the silicon substrate and a lower inductor layer formed at the lower part of the silicon substrate.
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