发明授权
- 专利标题: Substrate temperature adjusting-fixing device
- 专利标题(中): 基板温度调节固定装置
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申请号: US13453001申请日: 2012-04-23
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公开(公告)号: US08724289B2公开(公告)日: 2014-05-13
- 发明人: Norio Shiraiwa , Yuichi Hata
- 申请人: Norio Shiraiwa , Yuichi Hata
- 申请人地址: JP Nagano
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人地址: JP Nagano
- 代理机构: IPUSA, PLLC
- 优先权: JP2011-104087 20110509
- 主分类号: H02N13/00
- IPC分类号: H02N13/00
摘要:
A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.
公开/授权文献
- US20120287552A1 SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE 公开/授权日:2012-11-15
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