Invention Grant
- Patent Title: Use of infrared camera for real-time temperature monitoring and control
- Patent Title (中): 使用红外摄像机进行实时温度监控
-
Application No.: US13433780Application Date: 2012-03-29
-
Publication No.: US08724976B2Publication Date: 2014-05-13
- Inventor: Nir Merry , Stephen Moffatt , Kailash Patalay , David Keith Carlson
- Applicant: Nir Merry , Stephen Moffatt , Kailash Patalay , David Keith Carlson
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F26B19/00
Abstract:
Embodiments of the invention generally contemplate an apparatus and method for monitoring and controlling the temperature of a substrate during processing. One embodiment of the apparatus and method takes advantage of an infrared camera to obtain the temperature profile of multiple regions or the entire surface of the substrate and a system controller to calculate and coordinate in real time an optimized strategy for reducing any possible temperature non-uniformity found on the substrate during processing.
Public/Granted literature
- US20120183915A1 USE OF INFRARED CAMERA FOR REAL-TIME TEMPERATURE MONITORING AND CONTROL Public/Granted day:2012-07-19
Information query
IPC分类:
