发明授权
- 专利标题: Imprinting apparatus and imprinting method using the same
- 专利标题(中): 压印装置和使用其的压印方法
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申请号: US13107566申请日: 2011-05-13
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公开(公告)号: US08728377B2公开(公告)日: 2014-05-20
- 发明人: Doo Hee Jang , Tae Joon Song , Dhang Kwon , Hang Sup Cho , Seong Pil Cho , Ho Su Kim , Jin Hee Jang
- 申请人: Doo Hee Jang , Tae Joon Song , Dhang Kwon , Hang Sup Cho , Seong Pil Cho , Ho Su Kim , Jin Hee Jang
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: McKenna Long & Aldridge, LLP
- 优先权: KR10-2010-0053282 20100607
- 主分类号: B29C59/02
- IPC分类号: B29C59/02
摘要:
Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.
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