APPARATUS AND METHOD OF FABRICATING FLAT PANEL DISPLAY DEVICE
    1.
    发明申请
    APPARATUS AND METHOD OF FABRICATING FLAT PANEL DISPLAY DEVICE 有权
    制造平板显示装置的装置和方法

    公开(公告)号:US20110266709A1

    公开(公告)日:2011-11-03

    申请号:US13087519

    申请日:2011-04-15

    IPC分类号: B28B11/08

    摘要: Disclosed are an apparatus and method for fabricating a flat panel display device to realize easy separation of a substrate from an imprinting mold. The apparatus includes an imprinting mold connected to a substrate to form a thin film pattern on the substrate, a first adsorption pad to vacuum-adsorb the center of the imprinting mold, a second adsorption pad to vacuum-adsorb the periphery of the imprinting mold, and a connector connected to vacuum pins to vertically move in different regions of the first and second adsorption pads.

    摘要翻译: 公开了一种用于制造平板显示装置的装置和方法,以实现基板与压印模具的容易分离。 该装置包括:与基板连接以在基板上形成薄膜图案的压印模,用于真空吸附压印模的中心的第一吸附垫;第二吸附垫,用于真空吸附压印模的周边; 以及连接到真空管脚以在第一和第二吸附垫的不同区域垂直移动的连接器。

    IMPRINTING APPARATUS AND IMPRINTING METHOD USING THE SAME
    3.
    发明申请
    IMPRINTING APPARATUS AND IMPRINTING METHOD USING THE SAME 有权
    使用它的印刷装置和印刷方法

    公开(公告)号:US20110298159A1

    公开(公告)日:2011-12-08

    申请号:US13107566

    申请日:2011-05-13

    IPC分类号: B29C59/02

    摘要: Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.

    摘要翻译: 公开了一种使用其的压印装置和压印方法,其防止在基板上形成图案的过程受到平台度的影响。 该压印装置包括一个室单元,其中进行在基板上形成图案的工艺; 用于支撑其上形成有树脂层的基板的阶段; 安装构件,其位于所述平台上方,并具有附接到所述树脂层的模具构件,以在所述基板上形成所述图案; 以及第一喷射单元,其用于喷射流体以将由所述载物台支撑的所述基板与所述载物台分离,其中所述安装构件沿着与所述载物台分离的所述基板的方向移动所述模具构件,使得所述模具构件和所述树脂层为 互相接触。

    Imprinting apparatus and imprinting method using the same
    4.
    发明授权
    Imprinting apparatus and imprinting method using the same 有权
    压印装置和使用其的压印方法

    公开(公告)号:US08728377B2

    公开(公告)日:2014-05-20

    申请号:US13107566

    申请日:2011-05-13

    IPC分类号: B29C59/02

    摘要: Disclosed is an imprinting apparatus and imprinting method using the same that prevent a process of forming a pattern on a substrate from being affected by flatness of a stage. The imprinting apparatus comprises a chamber unit in which a process of forming a pattern on a substrate is carried out; a stage for supporting the substrate on which a resin layer is formed; an installing member positioned above the stage and having a mold member attached to transform the resin layer so as to form the pattern on the substrate; and a first spraying unit for spraying fluid to separate the substrate supported by the stage from the stage, wherein the installing member moves the mold member in the direction getting near to the substrate separated from the stage so that the mold member and the resin layer are brought into contact with each other.

    摘要翻译: 公开了一种使用其的压印装置和压印方法,其防止在基板上形成图案的过程受到平台度的影响。 压印装置包括一个室单元,其中进行在基板上形成图案的工艺; 用于支撑其上形成有树脂层的基板的阶段; 安装构件,其位于所述平台上方,并具有附接到所述树脂层的模具构件,以在所述基板上形成所述图案; 以及第一喷射单元,其用于喷射流体以将由所述载物台支撑的所述基板与所述载物台分离,其中所述安装构件沿着与所述载物台分离的所述基板的方向移动所述模具构件,使得所述模具构件和所述树脂层为 互相接触。

    METHOD OF MANUFACTURING ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE
    5.
    发明申请
    METHOD OF MANUFACTURING ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE 有权
    制造液晶显示装置的阵列基板的方法

    公开(公告)号:US20130109114A1

    公开(公告)日:2013-05-02

    申请号:US13563917

    申请日:2012-08-01

    IPC分类号: H01L33/42

    CPC分类号: H01L27/124 G02F1/134363

    摘要: A method of manufacturing an array substrate for a liquid crystal display device includes forming gate and data lines crossing each other on a substrate; forming a thin film transistor connected to the gate and data lines; forming a passivation layer on the substrate having the gate lines, data lines and the thin film transistor; forming a first conductive material layer on the passivation layer and connected to a drain electrode of the thin film transistor; oxidizing a surface of the first conductive material layer; forming a second conductive material layer on the oxidized first conductive material layer; forming a photoresist pattern on the second conductive material layer; etching the first and second conductive material layers using the photoresist pattern to form pixel and common electrodes which are alternately arranged in the pixel region and produces an in-plane electric field; and removing the photoresist pattern.

    摘要翻译: 制造液晶显示装置用阵列基板的方法包括:在基板上形成彼此交叉的栅极和数据线; 形成连接到栅极和数据线的薄膜晶体管; 在具有栅极线,数据线和薄膜晶体管的衬底上形成钝化层; 在所述钝化层上形成第一导电材料层并连接到所述薄膜晶体管的漏电极; 氧化第一导电材料层的表面; 在氧化的第一导电材料层上形成第二导电材料层; 在所述第二导电材料层上形成光致抗蚀剂图案; 使用光致抗蚀剂图案蚀刻第一和第二导电材料层以形成交替排列在像素区域中并产生平面内电场的像素和公共电极; 并去除光致抗蚀剂图案。

    ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    用于液晶显示装置的阵列基板及其制造方法

    公开(公告)号:US20130043477A1

    公开(公告)日:2013-02-21

    申请号:US13587625

    申请日:2012-08-16

    IPC分类号: H01L33/16 H01L33/08

    摘要: An array substrate for a liquid crystal display device comprises: gate and data lines crossing each other on a substrate to define a pixel region; a common line spaced apart from and parallel with the gate line; a thin film transistor in the pixel region and connected to the gate and data lines; a passivation layer on the thin film transistor; and pixel and common electrodes alternately arranged to produce an in-plane electric field, wherein each of the pixel and common electrodes has a double-layered structure of which the lower layer is formed of reflective conductive material and the upper layer is formed of transparent conductive material.

    摘要翻译: 一种用于液晶显示装置的阵列基板,包括:在基板上彼此交叉的栅极和数据线,以限定像素区域; 与栅极线间隔开并与栅极线平行的公共线; 像素区域中的薄膜晶体管,并连接到栅极和数据线; 薄膜晶体管上的钝化层; 以及交替排列以产生面内电场的像素和公共电极,其中每个像素和公共电极具有双层结构,其下层由反射导电材料形成,并且上层由透明导电 材料。

    Methods of fabricating imprint mold and of forming pattern using the imprint mold
    8.
    发明授权
    Methods of fabricating imprint mold and of forming pattern using the imprint mold 有权
    使用压印模具制造压印模具和成型图案的方法

    公开(公告)号:US08728331B2

    公开(公告)日:2014-05-20

    申请号:US12961983

    申请日:2010-12-07

    IPC分类号: C03C15/00

    摘要: A method of fabricating an imprint mold is disclosed. The method includes: forming a first photo resist pattern on a substrate; etching the substrate using the first photo resist pattern as an etch mask to form a first pattern in the substrate; ashing the first photo resist pattern to form a second photo resist pattern; and etching the substrate using the second photo resist pattern to form a second pattern derived from the substrate and a third pattern derived from the first pattern.

    摘要翻译: 公开了一种制造压印模具的方法。 该方法包括:在基板上形成第一光致抗蚀图案; 使用第一光致抗蚀剂图案作为蚀刻掩模蚀刻衬底,以在衬底中形成第一图案; 灰化第一光致抗蚀剂图案以形成第二光致抗蚀剂图案; 以及使用所述第二光致抗蚀剂图案蚀刻所述衬底以形成从所述衬底导出的第二图案和从所述第一图案导出的第三图案。

    LIQUID CRYSTAL DISPLAY DEVICE
    10.
    发明申请
    LIQUID CRYSTAL DISPLAY DEVICE 有权
    液晶显示装置

    公开(公告)号:US20130027625A1

    公开(公告)日:2013-01-31

    申请号:US13546851

    申请日:2012-07-11

    IPC分类号: G02F1/1368

    摘要: A liquid crystal display device is discussed, which includes a substrate; gate and data lines crossing each other on the substrate to thereby define a pixel region; a thin film transistor connected to the gate and data lines; and a plurality of pixel electrodes and a plurality of first common electrodes alternating with each other in the pixel region and configured to induce an in-plane electric field, and each including a first layer and a second layer on the first layer, wherein the first layer is made of an opaque metal and has a first thickness, and the second layer is made of a transparent conductive material and has a second thickness.

    摘要翻译: 讨论了一种液晶显示装置,其包括基板; 栅极和数据线在衬底上彼此交叉从而限定像素区域; 连接到栅极和数据线的薄膜晶体管; 以及多个像素电极和多个第一公共电极,其在像素区域中彼此交替并且被配置为引起面内电场,并且每个在第一层上包括第一层和第二层,其中第一层 层由不透明金属制成,具有第一厚度,第二层由透明导电材料制成,具有第二厚度。