发明授权
- 专利标题: Lithographic method for forming a pattern
- 专利标题(中): 用于形成图案的平版印刷方法
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申请号: US11932924申请日: 2007-10-31
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公开(公告)号: US08728380B2公开(公告)日: 2014-05-20
- 发明人: Stephen Y. Chou
- 申请人: Stephen Y. Chou
- 申请人地址: US MN Minneapolis
- 专利权人: Regents of the University of Minnesota
- 当前专利权人: Regents of the University of Minnesota
- 当前专利权人地址: US MN Minneapolis
- 代理机构: Polster Lieder
- 主分类号: B29C59/02
- IPC分类号: B29C59/02
摘要:
A lithographic method for forming a pattern within a surface on a substrate includes providing a substrate with a degradable material, molding the material to imprint a pattern thereon, depositing a layer of a second material over the imprinted pattern, removing portions of the layer of the second material to expose portions of the imprinted pattern of degradable material and removing portions of the exposed degradable material to leave an open pattern in the layer of second material.
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