Invention Grant
- Patent Title: Semiconductor substrate and method for manufacturing the same
- Patent Title (中): 半导体基板及其制造方法
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Application No.: US12935978Application Date: 2009-04-15
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Publication No.: US08729670B2Publication Date: 2014-05-20
- Inventor: Hae Yong Lee , Young Jun Choi , Jung Gyu Kim
- Applicant: Hae Yong Lee , Young Jun Choi , Jung Gyu Kim
- Applicant Address: KR
- Assignee: Lumigntech Co., Ltd.
- Current Assignee: Lumigntech Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2008-0035114 20080416; KR10-2008-0104550 20081024
- International Application: PCT/KR2009/001932 WO 20090415
- International Announcement: WO2009/128646 WO 20091022
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/20

Abstract:
Provided is a semiconductor substrate and a method for manufacturing the same. The semiconductor substrate includes a substrate, a discontinuously formed hemispheric metal layer on the substrate, and a semiconductor layer on the hemispheric metal layer. A plurality of voids on the interface of the substrate and discontinuous hemisphere are formed to absorb or relax the stain of interface. Accordingly, even if a subsequent layer is relatively thickly formed on the substrate, substrate bow or warpage can be minimized.
Public/Granted literature
- US20110024878A1 SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-02-03
Information query
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