发明授权
- 专利标题: Illumination system for a microlithographic projection exposure apparatus
- 专利标题(中): 用于微光刻投影曝光装置的照明系统
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申请号: US13181033申请日: 2011-07-12
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公开(公告)号: US08730455B2公开(公告)日: 2014-05-20
- 发明人: Damian Fiolka , Manfred Maul , Axel Scholz , Markus Deguenther , Johannes Wangler , Vladimir Davydenko
- 申请人: Damian Fiolka , Manfred Maul , Axel Scholz , Markus Deguenther , Johannes Wangler , Vladimir Davydenko
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Sughrue Mion, PLLC
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/72 ; G03F7/20 ; G03B27/68 ; G03B27/42 ; G03B27/52
摘要:
An illumination system for a microlithographic projection exposure step-and-scan apparatus has a light source, a first optical raster element and a second optical raster element. The first optical raster element extends in a first pupil plane of the illumination system and is designed such that the geometrical optical flux of the system is increased perpendicular to a scan direction of the projection exposure apparatus. The second optical raster element extends in a second pupil plane of the illumination system, which is not necessarily different from the first pupil plane, and is designed such that the geometrical optical flux of the system is increased in the scan direction and perpendicular thereto. This makes it possible to improve the irradiance uniformity in a reticle plane.
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